Influence of the process parameters on the properties of hydrogenated amorphous carbon thin films deposited using ECR plasma

By Piazza F.   Arnal Y.   Grambole D.   Herrmann F.   Kildemo M.   Lacoste A.   Relihan G.   Golanski A.  

Thin Solid Films, Vol. 383, Iss. 1, 2001-02 ,pp. : 196-199

Elsevier

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Influence of gas phase chemistry on the properties of hydrogenated amorphous silicon and silicon-carbon alloys grown by HACVD

By Dieguez Campo J.M.   Lenski M.   Comes F.J.  

Thin Solid Films, Vol. 323, Iss. 1, 1998-06 ,pp. : 115-125

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Structural and optical properties of amorphous hydrogenated fluorinated carbon films produced by PECVD

By Bica de Moraes M.A.   Durrant S.F.   Castro S.G.C.   Galvao D.S.   Bolivar-Marinez L.E.  

Thin Solid Films, Vol. 304, Iss. 1, 1997-07 ,pp. : 149-156

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Optical absorption of amorphous hydrogenated carbon thin films

By Meissner D.   Helmbold A.  

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The adhesion of hydrogenated amorphous carbon films on silicone

By Donnelly K.   Dowling D.P.   McConnell M.L.   Mooney M.  

Thin Solid Films, Vol. 394, Iss. 1, 2001-08 ,pp. : 101-107

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