Collimated Ti/TiN contact and barrier layers for sub 0.5 m CVD W-filled contact holes

Author: Biberger M.   Jackson S.   Tkach G.   Schlueter J.   Jones B.   Huang C.K.   Ouellet L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 522-525

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Abstract