Characterization of porous silicon-on-insulator films prepared by anodic oxidation

Author: Lee C.H.   Yeh C.C.   Hwang H.L.   Hsu K.Y.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.276, Iss.1, 1996-04, pp. : 147-150

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Abstract