Mechanical properties of a-C:H and a-C:H/SiO x nanocomposite thin films prepared by ion-assisted plasma-enhanced chemical vapor deposition

Author: Lee Y.H.   Lee J.H.   Kim D.S.   Farouk B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.280, Iss.1, 1996-07, pp. : 204-210

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Abstract