Metastable single-phase polycrystalline aluminium oxynitride films grown by MSIP: Constitution and structure

Author: Von Richthofen A.   Domnick R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.283, Iss.1, 1996-09, pp. : 37-44

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Abstract