Optical characterization of sputtered a-C:H overcoats: Relationship to accelerated wear testing, film composition and substrate temperature

Author： Muller D.E.   Li E.   Veersamy V.S.   Birkmeyer J.   Ward J.   Weiss J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.286, Iss.1, 1996-09, pp. : 59-63

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