Highly perfect thin films of SiC: X-ray double crystal diffractometry and X-ray double crystal topographic study

Author： Chaudhuri J.   Cheng X.   Yuan C.   Steckl A.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.292, Iss.1, 1997-01, pp. : 1-6

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