Comparison of Si 1-y C y films produced by solid-phase epitaxy and rapid thermal chemical vapour deposition

Author: McNeill D.W.   Gay D.L.   Armstrong G.A.   Armstrong B.M.   Gamble H.S.   Ray S.K.   Maiti C.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 149-152

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Abstract