Single shot excimer laser crystallization of silicon films deposited by LPCVD

Author： Kis-Sion K. Briand D. Mohammed-Brahim T. Sarret M. Lebihan F. Fortin B. Bonnaud O. Boher P. Stehle M. Stehle J.L.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.296, Iss.1, 1997-03, pp. : 53-56

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