Dependence of the C49-C54 TiSi 2 phase transition temperature on film thickness and Si substrate orientation

Author: Jeon H.   Yoon G.   Nemanich R.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.299, Iss.1, 1997-05, pp. : 178-182

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Abstract