The effect of elevated silicon substrate temperature on TiSi 2 formatio from a Ti film

Author： Ezoe K.   Yamamoto T.   Ishii K.   Matsumoto S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 244-247

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