The effect of additional ion/plasma assistance in CN x -film deposition based on a filtered cathodic arc

Author: Kuhn M.   Spaeth C.   Pintaske R.   Peter S.   Richter F.   Anders A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.311, Iss.1, 1997-12, pp. : 151-156

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Abstract