Direct observation of water incorporation in PECVD SiO 2 films by UV-Visible ellipsometry

Author: Vallee C.   Goullet A.   Granier A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.311, Iss.1, 1997-12, pp. : 212-217

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Abstract