Author: Pekker L.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.312, Iss.1, 1998-01, pp. : 341-347
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Model of d.c. magnetron reactive sputtering in Ar-O 2 gas mixtures
Thin Solid Films, Vol. 289, Iss. 1, 1996-11 ,pp. :
Vanadium reactive magnetron sputtering in mixed Ar/O 2 discharges
By Theil J.A. Kusano E. Rockett A.
Thin Solid Films, Vol. 298, Iss. 1, 1997-04 ,pp. :
By Seifarth H. Schmidt J.U. Grotzschel R. Klimenkov M.
Thin Solid Films, Vol. 389, Iss. 1, 2001-06 ,pp. :
Spectroscopic study and modelling of a reactive magnetron discharge in Ar/O 2 and in air
By Touzeau M. Pagnon D. Bretagne J.
Vacuum, Vol. 52, Iss. 1, 1999-01 ,pp. :
By Snyders R. Wautelet M. Gouttebaron R. Dauchot J.P. Hecq M.
Thin Solid Films, Vol. 423, Iss. 2, 2003-01 ,pp. :