Evaluation of adhesion strength of Ti films on Si(100) by the internal stress method

Author: Kinbara A.   Kusano E.   Kamiya T.   Kondo I.   Takenaka O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 165-168

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Abstract