Combined characterization of conductive materials by infrared spectroscopic ellipsometry and grazing X-ray reflectance

Author: Boher P.   Luttmann M.   Stehle J.L.   Hennet L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.319, Iss.1, 1998-04, pp. : 67-72

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Abstract