Role of energetic flux in low temperature Si epitaxy on dihydride-terminated Si (001)

Author: Taylor M.E.   Atwater H.A.   Murty M.V.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.324, Iss.1, 1998-07, pp. : 85-88

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