A modified multi-chemical spray cleaning process for post shallow trench isolation chemical mechanical polishing cleaning application

Author： Wang Y.L.   Wang T.C.   Wu J.   Tseng W.T.   Lin C.F.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 385-390

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