The effects of the process parameters on the electrical and microstructure characteristics of the CrSi thin resistor films: part I

Author： Wu F.   McLaurin A.W.   Henson K.E.   Managhan D.G.   Thomasson S.L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 418-422

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