Selective deposition of TiSi 2 on ultra-thin silicon-on-insulator (SOI) wafers

Author： Maa J.-s. Ulrich B. Teng Hsu S. Stecker G.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 412-417

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