Characterization of SiGe base layer in Si/SiGe heterojunction bipolar transistor layer structure

Author： Zhang J.   Jin X.   Tsien P.-H.   Lo T.-C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.333, Iss.1, 1998-11, pp. : 13-15

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