Optical and structural properties of low-temperature PECVD ETMS SiO x thin films

Author: Song Y.   Sakurai T.   Kishimoto K.   Maruta K.   Matsumoto S.   Kikuchi K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.334, Iss.1, 1998-12, pp. : 92-97

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Abstract