Optical and structural properties of SiO x and SiN x materials

Author： Dehan E.   Temple-Boyer P.   Henda R.   Scheid E.   Pedroviejo J.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.266, Iss.1, 1995-09, pp. : 14-19

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Optical and structural properties of low-temperature PECVD ETMS SiO x thin films

By Song Y.   Sakurai T.   Kishimoto K.   Maruta K.   Matsumoto S.   Kikuchi K.  

Thin Solid Films, Vol. 334, Iss. 1, 1998-12 ,pp. : 92-97

Elsevier

Access to resources Recommend Favorite

Structural and optical properties of Si/Si 1-x Ge x wires

By Zhuang Y.   Schelling C.   Stangl J.   Penn C.   Senz S.   Schaffler F.   Roch T.   Daniel A.   Grenzer J.   Pietsch U.   Bauer G.  

Thin Solid Films, Vol. 369, Iss. 1, 2000-07 ,pp. : 409-413

Elsevier

Access to resources Recommend Favorite

Plasma-enhanced chemical vapor deposition of SiO x /SiN x Bragg reflectors

By Gottschalch V.   Schmidt R.   Rheinlander B.   Pudis D.   Hardt S.   Kvietkova J.   Wagner G.   Franzheld R.  

Thin Solid Films, Vol. 416, Iss. 1, 2002-09 ,pp. : 224-232

Elsevier

Access to resources Recommend Favorite

Structural and optical properties of r.f.-sputtered Si x C 1-x :O films

By Ech-Chamikh E.   Ameziane E.L.   Bennouna A.   Azizan M.   Nguyen Tan T.A.   Lopez-Rios T.  

Thin Solid Films, Vol. 259, Iss. 1, 1995-04 ,pp. : 18-24

Elsevier

Access to resources Recommend Favorite

Effect of vacuum rapid thermal annealing on the properties of SiN x films

By Beshkov G.   Dimitrov D.B.   Velchev N.   Petrov P.   Ivanov B.   Zambov L.   Dimitrova T.  

Vacuum, Vol. 58, Iss. 2, 2000-08 ,pp. : 509-515

Elsevier

Access to resources Recommend Favorite