Effect of the substrate temperature on the deposition of hydrogenated amorphous carbon by PACVD at 35 kHz

Author： Gago R.   Sanchez-Garrido O.   Climent-Font A.   Albella J.M.   Roman E.   Raisanen J.   Rauhala E.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.338, Iss.1, 1999-01, pp. : 88-92

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