Crystallization and decrease in resistivity on heat treatment of amorphous indium tin oxide thin films prepared by d.c. magnetron sputtering

Author： Morikawa H.   Fujita M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.339, Iss.1, 1999-02, pp. : 309-313

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