Properties of the plasma produced by multi-cathode electron beam plasma sources

Author: Kang Y.B.   Jeon H.   Kim T.Y.   Chung K.H.   Ko D.K.   Jung J.K.   Noh S.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 9-12

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Abstract