Two-dimensional spatial distributions of sputtered particles produced in a planar magnetron discharge of indium-tin-oxide target

Author： Matsuda Y.   Muta M.   Fujiyama H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 167-171

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