X-ray emission spectra and interfacial solid-phase reactions in Hf/(001)Si system

Author: Galakhov V.R.   Kurmaev E.Z.   Shamin S.N.   Fedorenko V.V.   Elokhina L.V.   Pivin J.C.   Zaima S.   Kojima J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.350, Iss.1, 1999-08, pp. : 143-146

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Abstract