Statistical evaluation of refractive index, growth rate, hardness and Young's modulus of aluminium oxynitride films

Author: Dreer S.   Krismer R.   Wilhartitz P.   Friedbacher G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.354, Iss.1, 1999-10, pp. : 43-49

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Abstract