Frequency response in pulsed DC reactive sputtering processes

Author: Jonsson L.B.   Nyberg T.   Katardjiev I.   Berg S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.365, Iss.1, 2000-04, pp. : 43-48

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract