Low temperature doping of poly-SiGe films with boron by co-sputtering

Author: Jelenkovic E.V.   Tong K.Y.   Cheung W.Y.   Wilson I.H.   Wong S.P.   Poon M.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.368, Iss.1, 2000-06, pp. : 55-60

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Abstract