Ge-induced enhancement of solid-phase crystallization of Si on SiO 2

Author: Yamaguchi S.   Park S.-k.   Sugii N.   Nakagawa K.   Miyao M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 195-198

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Abstract