Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.376, Iss.1, 2000-11, pp. : 241-248
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Electrical transport properties of microcrystalline silicon thin films prepared by Cat-CVD
By Liu F. Zhu M. Feng Y. Han Y. Liu J.
Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. :
Access to resources
Recommend
Microscopic characterization of microcrystalline silicon thin films
By Sieber I. Schmidt M. Urban I. Dorfel I. Koynov S. Schwarz R.
Thin Solid Films, Vol. 276, Iss. 1, 1996-04 ,pp. :
Microcrystalline silicon thin films for optical applications
By Vieira M. Morgado E. Macarico A. Koynov S. Schwarz R.
Vacuum, Vol. 52, Iss. 1, 1999-01 ,pp. :
Large area microcrystalline silicon films grown by ECR-CVD
By Ferrero S. Mandracci P. Cicero G. Giorgis F. Pirri C.F. Barucca G.
Thin Solid Films, Vol. 383, Iss. 1, 2001-02 ,pp. :