Atomic-layer doping in Si by alternately supplied PH 3 and SiH 4

Author: Shimamune Y.   Sakuraba M.   Matsuura T.   Murota J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.380, Iss.1, 2000-12, pp. : 134-136

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Abstract