Doping and electrical characteristics of in-situ heavily B-doped Si 1-x-y Ge x C y films epitaxially grown using ultraclean LPCVD

Author: Noda T.   Lee D.   Shim H.   Sakuraba M.   Matsuura T.   Murota J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.380, Iss.1, 2000-12, pp. : 57-60

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Abstract