Microstructural and optical properties of as-deposited LPCVD silicon films

Author: Modreanu M.   Tomozeiu N.   Gartner M.   Cosmin P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 254-257

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Abstract