Author: Modreanu M. Tomozeiu N. Gartner M. Cosmin P.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 254-257
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Optical and electrical properties of LPCVD silicon oxynitride films on silicon
By Szekeres A. Alexandrova S. Modreanu M. Cosmin P. Gartner M.
Vacuum, Vol. 61, Iss. 2, 2001-05 ,pp. :
Optical properties of LPCVD silicon oxynitride
By Modreanu M. Tomozeiu N. Cosmin P. Gartner M.
Thin Solid Films, Vol. 337, Iss. 1, 1999-01 ,pp. :
Residual stress in silicon films deposited by LPCVD from disilane
By Temple-Boyer P. Scheid E. Faugere G. Rousset B.
Thin Solid Films, Vol. 310, Iss. 1, 1997-11 ,pp. :
By del Prado A. San Andres E. Martnez F.L. Martil I. Gonzalez-Daz G. Bohne W. Rohrich J. Selle B. Fernandez M.
Vacuum, Vol. 67, Iss. 3, 2002-09 ,pp. :