Stability of unhydrogenated polysilicon thin film transistors and structural quality of the channel material

Author: Toutah H.   Tala-Ighil B.   Llibre J.F.   Rahal A.   Mourgues K.   Helen Y.   Mohammed-Brahim T.   Dassow R.   Kohler J.R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 299-302

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Abstract