Influence of oxygen on the morphological and structural properties of Ti thin films grown by ion beam-assisted deposition

Author: Lopez J.M.   Gordillo-Vazquez F.J.   Fernandez M.   Albella J.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.384, Iss.1, 2001-03, pp. : 69-75

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Abstract