Modeling and experimental comparison of pulsed plasma deposition of aniline

Author： Shepsis L.V.   Pedrow P.D.   Mahalingam R.   Osman M.A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.385, Iss.1, 2001-04, pp. : 11-21

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