Thin SiGe buffer layer growth by in situ low energy hydrogen plasma preparation

Author: Kuchenbecker J.   Kibbel H.   Muthsam P.   Konig U.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 146-152

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Abstract