High-rate deposition of amorphous silicon films using hot-wire CVD with a coil-shaped filament

By Povolny H.S.   Deng X.  

Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 125-129

Elsevier

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Monte Carlo simulations on large-area deposition of amorphous silicon by hot-wire CVD

By Pfluger A.   Schroder B.   Bart H.-J.  

Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 73-77

Elsevier

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Hot-wire deposition of amorphous and microcrystalline silicon using different gas excitations by a coiled filament

By Deng X.   Povolny H.S.  

Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 304-308

Elsevier

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Hot-wire produced atomic hydrogen: effects during and after amorphous-silicon deposition

By Brockhoff A.M.   van der Weg W.F.   Habraken F.H.P.M.  

Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. : 87-91

Elsevier

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Influence of gas supply and filament geometry on the large-area deposition of amorphous silicon by hot-wire CVD

By Ledermann A.   Weber U.   Mukherjee C.   Schroeder B.  

Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. : 61-65

Elsevier

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