Thin film poly-Si formation by Cat-CVD method and its application for solar cells

Author: Niira K.   Senta H.   Hakuma H.   Komoda M.   Okui H.   Fukui K.   Arimune H.   Shirasawa K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 315-319

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Abstract