The influence of the filament temperature on the structure of hot-wire deposited silicon

By van der Werf C.H.M.   van Veenendaal P.A.T.T.   van Veen M.K.   Hardeman A.J.   Rusche M.Y.S.   Rath J.K.   Schropp R.E.I.  

Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. : 46-49

Elsevier

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Deposition of hydrogenated amorphous silicon (a-Si:H) films by hot wire chemical vapor deposition: role of filament temperature

By Jadkar S.R.   Sali J.V.   Kshrisagar S.T.   Takwale M.G.  

Thin Solid Films, Vol. 437, Iss. 1, 2003-08 ,pp. : 18-24

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The influence of filament temperature on crystallographic properties of poly-Si films prepared by the hot-wire CVD method

By Lee J.C.   Kang K.H.   Kim S.K.   Yoon K.H.   Song J.   Park I.J.  

Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. : 188-193

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Catalytic decomposition of SiH 4 on a hot filament

By Tange S.   Inoue K.   Tonokura K.   Koshi M.  

Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. : 42-46

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An Investigation of the Constant-Temperature Hot-Wire Anemometer

By Watmuff J.H.  

Experimental Thermal and Fluid Science, Vol. 11, Iss. 2, 1995-08 ,pp. : 117-134

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