Annealing of amorphous Ir 18 Si 15 O 67 films in dry oxygen

Author: Giauque P.H.   Cherry H.B.   Nicolet M.-A.   Bernard C.   Pisch A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 299-301

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Abstract