Characteristics of ultra water-repellent thin films prepared by combined process of microwave plasma-enhanced CVD and oxygen-plasma treatment

Author： Wu Y.   Inoue Y.   Sugimura H.   Takai O.   Kato H.   Murai S.   Oda H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 45-49

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