Preparation and characterization of RuO 2 thin films from Ru(CO) 2 (tmhd) 2 by metalorganic chemical vapor deposition

Author： Chen R.-s. Huang Y.-s. Chen Y.-l. Chi Y.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.413, Iss.1, 2002-06, pp. : 85-91

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