Plasma deposition of amorphous carbon films from CH 4 atmospheres highly diluted in Ar

Author: Jacobsohn L.G.   Capote G.   Cruz N.C.   Zanatta A.R.   Freire Jr. F.L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.419, Iss.1, 2002-11, pp. : 46-53

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Abstract