Structural investigation of Si-rich amorphous silicon oxynitride films

Author: Scopel W.L.   Fantini M.C.A.   Alayo M.I.   Pereyra I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.425, Iss.1, 2003-02, pp. : 275-281

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Abstract