Alternative phosphorus-doped amorphous silicon using trimethylphosphine diluted in hydrogen

Author： Terasa R.   Albert M.   Bartha J.W.   Roessler T.   Abramov A.S.   Kosarev A.I.   Kuduyarova V.K.   Vinogradov A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 270-273

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