Polycrystalline silicon thin films for MEMS applications

Author: Mahfoz-Kotb H.   Salaun A.C.   Mohammed-Brahim T.   Le Bihan F.   El-Marssi M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 422-426

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Abstract